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Bump BenchmarkDotNet and System.Collections.Immutable

Bumps [BenchmarkDotNet](https://github.com/dotnet/BenchmarkDotNet) and [System.Collections.Immutable](https://github.com/dotnet/runtime). These dependencies needed to be updated together.

Updates `BenchmarkDotNet` from 0.13.12 to 0.14.0
- [Release notes](https://github.com/dotnet/BenchmarkDotNet/releases)
- [Commits](https://github.com/dotnet/BenchmarkDotNet/compare/v0.13.12...v0.14.0)

Updates `System.Collections.Immutable` from 1.5.0 to 5.0.0
- [Release notes](https://github.com/dotnet/runtime/releases)
- [Commits](https://github.com/dotnet/runtime/commits/v5.0.0)

---
updated-dependencies:
- dependency-name: BenchmarkDotNet
  dependency-type: direct:production
  update-type: version-update:semver-minor
- dependency-name: System.Collections.Immutable
  dependency-type: direct:production
  update-type: version-update:semver-major
...

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